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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Frontiers of Mechanical Engineering 2023, Volume 18, Issue 2, doi: 10.1007/s11465-023-0747-1

Abstract: Capacitive sensors are efficient tools for biophysical force measurement, which is essential for theinterferences on capacitive sensors.In this work, a bionic swallow structure design norm was developed for mechanical decoupling, and theinfluences of structural parameters on mechanical behavior were fully analyzed and optimized.Based on the proposed bionic decoupling method, the fabricated sensor exhibited overwhelming capacitive

Keywords： micro-electro-mechanical system capacitive sensor     bionics     operation instability     mechanical and electrical    

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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5,   Pages 801-809 doi: 10.1631/FITEE.2100236

Abstract: We propose an inductor-capacitor (LC) wireless passive , which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using . It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s). Moreover, the maximum error of the accelerometer was less than 0.037%.

Keywords： Bending structure surfaces     Flexible accelerometer     Micro-electro-mechanical system (MEMS) technology    

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 1,   Pages 37-43 doi: 10.1007/s11465-008-0001-x

Abstract: A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, whichare based on micro electro-mechanical systems (MEMS) technology.Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volumeThe final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer

Keywords： mini-spectrophotometer     referenced     micro-silicon-fixer     electro-mechanical     correlation coefficient    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different biasBased on the theoretical results, micro accelerometer is fabricated and tested to study the influences

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Strategic Study of CAE 2000, Volume 2, Issue 3,   Pages 36-41

Abstract:

The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.The stiction, called release-related stiction, can occur within micron gaps of Si microstuctures during the etching of sacrifacial layer by HF and drying. It can also occur after packaging of the device due to over range of input signals and is called in-use stiction. It is concluded that the capillary force of water between two Si hydrophilic surfaces at separation gap of micron is the major contributor to the release-related stiction. The origin of in-use adhesion is from the chemical state of Si surface. Coating of anti-stiction films on the surface of Si microstructures and packaging of devices under dry atmosphere or vacuum are the most important methods to prevent the in MEMS devices from stiction. The preparation technology of anti-stiction films and its problems are described. Comparing with stiction, the friction is more complex. The commercially produced accelerometers and digital mirror devices are the devices with no direct contact friction. After using anti-stiction films, the stiction is fully prevented, and even the friction is apparently decreased. However, friction still exists in MEMS of direct contact moving parts. The wear resoluted from friction will decrease the reliability and lifetime of the devices. To fabricate the films with anti-stiction and wear-resitsting ability are the key research projects in high speed moving MEMS devices.

Keywords： micro electro mechanical systems     stiction     friction     anti-stiction films     wear-resisting films    

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Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 539-545 doi: 10.1007/s11465-017-0427-0

Abstract:

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuitThe micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuitsThe sensor, which adheres to an object surface, can detect the surface flow around the object.In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect

Keywords： micro flow sensor     flexible sensor     surface flow sensing     aerodynamic parameter     micro aerial vehicle (MAV    

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Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Frontiers in Energy 2009, Volume 3, Issue 4,   Pages 381-388 doi: 10.1007/s11708-009-0057-2

Abstract: The effect of Joule heating on the steady state electro-osmotic flow in a closed-end micro-channel ispresence of Joule heating causes an increase in temperature and a decrease in viscosity in the whole micro-channelfluid velocity at the central region in order to maintain a zero flow rate at the cross section of the micro-channelas a micro-actuator.significantly smaller than that without considering Joule heating when the wall temperature of the micro-channel

Keywords： closed-end micro-channel     electrical double layer     electro-osmotic flow     induced pressure gradient     Joule    

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Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Frontiers of Engineering Management 2016, Volume 3, Issue 2,   Pages 115-122 doi: 10.15302/J-FEM-2016019

Abstract: assessment method and the life cycle cost analysis, the optimal timing model of active remanufacturing for electro-mechanicalremanufacturing as its guidance, this study explores the economic efficiency and corresponding operation mode of electro-mechanicalTo validate the optimal timing model for electro-mechanical products active remanufacturing, a specific

Keywords： electro-mechanical products     active remanufacturing     optimal timing     reverse logistics     recycling mode    

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Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 18-32 doi: 10.1007/s11465-017-0410-9

Abstract: The miniaturization of devices in different fields requires production of micro- and nano-scale componentsThis paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining.

Keywords： micro machining     cutting     electro discharge machining (EDM)     laser machining     focused ion beam (FIB)    

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Effects of environmental media on the transmission of an inductive link in wireless microsystems

Lei DONG, Li-Feng WANG, Qing-An HUANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 554-556 doi: 10.1007/s11465-017-0450-1

Abstract: magnetically coupled coils in wireless microsystems is modeled by considering an additional parasitic capacitiveWith a system of inductor-capacitor passive wireless sensors, the effects of environmental media areResults suggest that the capacitive link is non-negligible when the distance between the two coupled

Keywords： capacitive link     monitoring correction     passive wireless sensor    

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Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

Frontiers of Structural and Civil Engineering 2021, Volume 15, Issue 4,   Pages 1047-1057 doi: 10.1007/s11709-021-0755-3

Abstract: The micro-steel fibers (MSF) were added to MPC-based concrete to enhance its ductility due to the highThis paper investigates the effect of MSF volume fraction on the mechanical properties of a new pattern

Keywords： magnesium phosphate cement-based concrete     micro-steel fibers     four-point flexural strength     compressive    

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Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Strategic Study of CAE 2002, Volume 4, Issue 6,   Pages 56-62

Abstract:

The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging andIt is used to seal micro channel or micro hole to form a vacuum or low-pressure cavity or protect fromThe commercialized pressure sensors, accelerometers, digital micro mirror devices, etc., collected from

Keywords： packaging of MEMS     bulk silicon bonding technology     film-sealed technology    

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The high-performance micro sensor and digital system for monitoring of the oil and gas field

Zhao Yulong,Niu Zhe,Zhou Guanwu,Zhao Libo,Jiang Zhuangde

Strategic Study of CAE 2013, Volume 15, Issue 1,   Pages 99-105

Abstract: And the related high-performance digital transmitter system was produced.which the traditional sensor can't suit for.And the associated equipment were integrated into the system.Through the experiments, the high-accuracy and reliable of the high-performance micro sensor anddigital transmitter system were credible.

Keywords： high-temperature and high-pressure sensor chip     high-performance digital transmitter system     digitalcompensation technology     wireless sensor network     high accuracy    

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Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers

Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili

Frontiers of Chemical Science and Engineering 2018, Volume 12, Issue 1,   Pages 174-183 doi: 10.1007/s11705-017-1670-y

Abstract: Polysulfone (PSf) membranes were modified by either a new organic modifier (sulfonated poly(ether sulfide sulfone), SPESS) or a traditional modifier (rice hulk). These membranes were further reinforced with either multi-walled carbon nanotubes (MWCNTs) or silica nanoparticles. Having a dye rejection of 98.46%, the reinforced membranes increased more than 50% in strength but no change in solution flux was observed. The morphological and roughness studies were conducted using scanning electron microscopy and atomic force microscopy. Moreover, the PSF membranes were also characterized by differential scanning calorimetry. Modifying the membranes with organic modifier or nanofiller increases the glass transition temperature ( ). The highest and strength were observed for the PSf-SPESS-MWCNT membrane. SPESS decreases surface roughness but MWCNT increases roughness on the nanoscale. All membranes show a bimodal pore size distribution, whereas the PSf-SPESS-MWCNT membrane exhibits a relatively uniform distribution of macroscopic and microscopic pores.

Keywords： polysulfone membrane     mechanical properties     micro- and nano-modification     binary and ternary system     dye    

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An Area Changeable Capacitive Micro-machined Accelerometer

Li Baoqing,Lu Deren,Wang Weiyuan

Strategic Study of CAE 2000, Volume 2, Issue 2,   Pages 36-40

Abstract: quasi-LIGA technology with Ni as structure layer and Cu as sacrificial layer is used to fabricate the sensor

Keywords： capacitance     accelerometer     area changeable    

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Title Author Date Type Operation

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Journal Article

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Journal Article

Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

Journal Article

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

Stiction and Friction in Micro Electro Mechanical Systems

Wang Weiyuan

Journal Article

Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

Journal Article

Effect of Joule heating on electro-osmotic flow in a closed-end micro-channel with isothermal and convective

Liang ZHAO, Linhua LIU,

Journal Article

Optimal Timing and Recycling Operation Mode for Electro-Mechanical Products Active Remanufacturing

Wang Gao,Tao Li,Shi-tong Peng,Liang Wang,Hong-chao Zhang

Journal Article

Recent advances in micro- and nano-machining technologies

Shang GAO, Han HUANG

Journal Article

Effects of environmental media on the transmission of an inductive link in wireless microsystems

Lei DONG, Li-Feng WANG, Qing-An HUANG

Journal Article

Experimental study on mechanical properties of a novel micro-steel fiber reinforced magnesium phosphate

Journal Article

Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Journal Article

The high-performance micro sensor and digital system for monitoring of the oil and gas field

Zhao Yulong,Niu Zhe,Zhou Guanwu,Zhao Libo,Jiang Zhuangde

Journal Article

Strengthening of polysulfone membranes using hybrid mixtures of micro- and nano-scale modifiers

Peyman P. Selakjani, Majid Peyravi, Mohsen Jahanshahi, Hamzeh Hoseinpour, Ali S. Rad, Soodabeh Khalili

Journal Article

An Area Changeable Capacitive Micro-machined Accelerometer

Li Baoqing,Lu Deren,Wang Weiyuan

Journal Article